Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals
نویسندگان
چکیده
In this study, the peculiarities of the transformations of gold films deposited on the Si wafer surfaces as a result of high temperature anneals are investigated experimentally depending on the conditions of wafer surface preparation and the annealing regimes. The morphology and the distribution functions of the crystallites of gold films as well as the gold droplets formed as a result of anneals are studied as functions of annealing temperature, type of annealing (rapid thermal or rapid furnace annealing), and the state of the surface of Si wafers. The results obtained can be used for the controlled preparation of the arrays of catalytic gold droplets for subsequent growth of Si wire-like crystals.
منابع مشابه
β-galactosidase Production by Aspergillus niger ATCC 9142 Using Inexpensive Substrates in Solid-State Fermentation: Optimization by Orthogonal Arrays Design
Background: Enzymatic hydrolysis of lactose is one of the most important biotechnological processes in the food industry, which is accomplished by enzyme β-galactosidase (β-gal, β-D-galactoside galactohydrolase, EC 3.2.1.23), trivial called lactase. Orthogonal arrays design is an appropriate option for the optimization of biotechnological processes for the production of microbial...
متن کاملIn Situ Formation of SiC/CNT Ceramic Nanocomposite by Phenolic Pyrolysis
In this research, using pyrolysis of phenolic resin in the presence of silicon particles, the SiC ceramic composite is formed. The samples were prepared by introducing 30, 35, 40, 45 and 50 wt% of Si particles to the phenolic resin. The samples were cured at 180°C then carbonized at 1100°C. The final carbonized C/Si composites are hot-pressed at 1500°C in inert atmosphere, which is more than th...
متن کاملFormation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films
Formation of Ge nanocrystals in SiNx matrices has been studied using plasma enhanced chemical vapor deposition in both as deposited samples as well as in post-vacuum annealed samples. Low temperature and short duration anneals in vacuum resulted in Ge nanocrystals whereas prolonged anneals at higher temperatures resulted in Ge nanocrystals accompanied with SiGe formation at the SiNx/Si interfac...
متن کاملMulti-electrode arrays technology for the non-invasive recording of neural signals: a review article
The recording of electrophysiological activities of brain neurons in the last half-century has been considered as one of the effective tools for the development of neuroscience. One of the techniques for recording the activity of nerve cells is the multi-electrode arrays (MEAs). Microelectrode arrays (MEAs) are usually employed to record electrical signals from electrogenic cells like neurons o...
متن کاملFabrication of porous silicon by metal-assisted etching using highly ordered gold nanoparticle arrays
A simple method for the fabrication of porous silicon (Si) by metal-assisted etching was developed using gold nanoparticles as catalytic sites. The etching masks were prepared by spin-coating of colloidal gold nanoparticles onto Si. An appropriate functionalization of the gold nanoparticle surface prior to the deposition step enabled the formation of quasi-hexagonally ordered arrays by self-ass...
متن کامل